Semiconductor industry

We have delivered several wafer handling systems for semiconstructor industry. The systems are installed in cleanrooms with standards going up to ISO 1. The wafer handling solutions cover a wide variety of uses from serving specialized process devices to microscope inspection.

KSS542 Wafer Loader for microscope inspection

KINE Wafer Loader for microscope inspection is collaboration robot system designed to assist human worker in wafer handling during microscope inspection. The solution enables microscope inspection of wafers with zero manual handling of wafers. In addition, the automated handling and identification processes allow reduce human errors and makes it possible to store inspection findings in a digital form.

Main functionalities:

  • Collaboration robot
  • Cross-slot scanning
  • Wafer alignment
  • Wafer code reading
  • Joystick control under microscope
  • Wafer fault marking