KSS542 Wafer Loader for microscope inspection
KINE Wafer Loader for microscope inspection is collaboration robot system designed to assist human worker in wafer handling during microscope inspection. The solution enables microscope inspection of wafers with zero manual handling of wafers. In addition, the automated handling and identification processes allow reduce human errors and makes it possible to store inspection findings in a digital form.
Main functionalities:
- Collaboration robot
- Cross-slot scanning
- Wafer alignment
- Wafer code reading
- Joystick control under microscope
- Wafer fault marking
